Planar magnetron with moving magnet assembly

Details Planar magnetron with moving magnet assembly Planar magnetron with moving magnet assembly

H - Electricity

01

J

H01J 37/34 (2006.01)

Patent

CA 2310678

The present invention provides a planar magnetron including a surface for mounting a planar substantially polygonal target (2) having a substantially central target area for sputtering onto a substrate. The magnetron comprises an array of magnets (4) defining a closed loop magnetic field for generating an elongated plasma race-track above the target (2). Means for establishing cyclical, relative, substantially translational movement between the race- track and the target support surface are provided, the substantially translational movement being substantially parallel to this surface and the trace of the substantially translational movement being a two-dimensional figure. The periphery of the race-track lies substantially within said substantially central target area throughout each cycle, the establishing means being adapted to provide a substantially uniform erosion of the target (2) at least within said substantially central target area. The figure defining the translational motion preferably has a generally hypotrochoidal or a generally epitrochoidal form.

La présente invention concerne un magnétron plan comprenant une surface destinée au montage d'une cible plane (2) sensiblement polygonale présentant une surface de cible sensiblement centrale destinée à la pulvérisation sur un substrat. Le magnétron comprend un ensemble d'aimants (4) définissant un champ magnétique en circuit fermé produisant une piste de voie de plasma allongée au-dessus de la cible (2). On a prévu des moyens destinés à établir un mouvement de translation cyclique relatif entre la piste de voie et la surface de support de la cible, le mouvement de translation étant sensiblement parallèle à cette surface et la piste du mouvement de translation étant une figure bidimensionnelle. La périphérie de la piste de voie se trouve sensiblement à l'intérieur de ladite surface de la cible sensiblement centrale, à l'intérieur dans chaque cycle, les moyens d'établissement étant adaptés pour produire une érosion sensiblement uniforme de la cible (2) au moins à l'intérieur de ladite surface de cible sensiblement centrale. La figure définissant le mouvement de translation a de préférence une forme générale hypotrochoïde ou épitrochoïde.

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