Planar structure for high voltage semiconductor devices with...

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H01L 29/06 (2006.01) H01L 23/31 (2006.01) H01L 23/58 (2006.01) H01L 29/34 (2006.01) H01L 29/739 (2006.01) H01L 29/747 (2006.01) H01L 29/78 (2006.01) H01L 29/08 (2006.01)

Patent

CA 1175953

IR-699 PLANAR STRUCTURE FOR HIGH VOLTAGE SEMICONDUCTOR DEVICES WITH GAPS IN GLASSY LAYER OVER HIGH FIELD REGIONS ABSTRACT OF THE DISCLOSURE Two gaps are placed in the reflowed phosphorus- doped silicon-dioxide material overcoating of a planar high voltage semiconductor device to prevent polarization of the reflowed silox. The invention is applicable to any device using a polarizable glassy coating which will be exposed to a high electric field extending along its surface and is shown applied to a high voltage diode, a high voltage MOSFET and a high voltage TRIMOS-type device which is a semiconductor switching device using spaced MOS transistors having a common drain region.

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