H - Electricity – 05 – H
Patent
H - Electricity
05
H
H05H 1/46 (2006.01) C23C 16/27 (2006.01) C23C 16/511 (2006.01) C30B 29/04 (2006.01)
Patent
CA 2072455
ABSTRACT The invention relates to a method of forming a plasma for assisting in the production of a ceramic material such as diamonds. The method includes the steps of providing a bell jar, and introducing a selected gas into the bell jar.The gas may comprise an active gas such as hydrogen, and a gaseous carbon compound. A beam of microwave radiation is generated from a remote source, and is focused using an array of lenses or mirrors to a focal region within the reaction chamber so as to form a plasma in this region. The shape of the plasma is independent of the inner profile of the chamber and dependent on the geometry and position of the focusing array. A substrate is located within the reaction chamber, and the plasma interacts with the substrate so as to cause chemical vapour deposition of, for instance, a plasma activated carbon component of the plasma onto the substrate. The invention extends to apparatus for use in the method.
Hawkins Dennis Charles
Holliday Harry Richard
Sussmann Ricardo Simon
Wort Christopher John Howard
de Beers Industrial Diamond Division (proprietary)
Ridout & Maybee Llp
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