Plasma assisted diamond synthesis

H - Electricity – 05 – H

Patent

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Details

H05H 1/46 (2006.01) C23C 16/27 (2006.01) C23C 16/511 (2006.01) C30B 29/04 (2006.01)

Patent

CA 2072455

ABSTRACT The invention relates to a method of forming a plasma for assisting in the production of a ceramic material such as diamonds. The method includes the steps of providing a bell jar, and introducing a selected gas into the bell jar.The gas may comprise an active gas such as hydrogen, and a gaseous carbon compound. A beam of microwave radiation is generated from a remote source, and is focused using an array of lenses or mirrors to a focal region within the reaction chamber so as to form a plasma in this region. The shape of the plasma is independent of the inner profile of the chamber and dependent on the geometry and position of the focusing array. A substrate is located within the reaction chamber, and the plasma interacts with the substrate so as to cause chemical vapour deposition of, for instance, a plasma activated carbon component of the plasma onto the substrate. The invention extends to apparatus for use in the method.

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