H - Electricity – 05 – H
Patent
H - Electricity
05
H
H05H 1/34 (2006.01) H01J 37/32 (2006.01)
Patent
CA 2750789
A plasma coating plant for coating or treating the surface of a substrate (3) is proposed, having a work chamber (2) which can be evacuated and into which the substrate (3) can be placed, and having a plasma torch (4) for generating a plasma jet (5) by heating a process gas, wherein the plasma torch (4) has a nozzle (41) through which the plasma jet (5) can exit the plasma torch (4) and can extend along a longitudinal axis (A) into the work chamber (2), wherein a mechanical limiting apparatus (12) is provided downstream of the nozzle (41) in the work chamber (2), which mechanical limiting apparatus extends along the longitudinal axis (A) and protects the plasma jet (5) against an unwanted lateral intrusion of particles. A corresponding method is also proposed.
L'invention concerne une installation de revêtement au plasma d'un substrat (3), comprenant une chambre de traitement (2) permettant une mise sous vide et dans laquelle le substrat (3) peut être placé, et une torche à plasma (4) pour la production d'un jet de plasma (5), par chauffage d'un gaz de procédé, caractérisée en ce que la torche à plasma (4) présente une buse (41) à travers laquelle le jet de plasma (5) peut sortir de la torche au plasma (4) et s'étendre le long d'un axe longitudinal (A) dans la chambre de traitement (2), et en ce qu'il est prévu en aval de la buse (41), dans la chambre de traitement (2), un dispositif de limitation mécanique (12), qui s'étend le long de l'axe longitudinal (A) et protège le jet de plasma (5) contre une pénétration indésirable, latérale, de particules. L'invention concerne un outre un procédé correspondant.
Gindrat Malko
Guittienne Philippe
Hollenstein Christoph
Gowling Lafleur Henderson Llp
Sulzer Metco Ag
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