Plasma deposition apparatus and method for making solar cells

C - Chemistry – Metallurgy – 23 – C

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C23C 16/507 (2006.01) C23C 16/54 (2006.01) H01L 31/20 (2006.01)

Patent

CA 2649520

A plasma deposition apparatus for making solar cells comprising a conveyor having a longitudinal axis for supporting at least one substrate; at least two modules each having at least one plasma torch for depositing a layer of a reaction product on the at least one substrate, the at least one plasma torch located a distance from the at least one substrate; a chamber for containing the conveyor and the at least two modules; and an exhaust system. In another embodiment, the plasma deposition apparatus for making solar cells comprises: means for supporting a substrate; means for supplying reactants; plasma torch means for depositing a product on the substrate, the plasma torch means located a distance from the substrate; and means for oscillating the plasma torch means relative to the substrate.

L'invention concerne un appareil de dépôt par plasma pour la fabrication de cellules solaires, qui comprend : une courroie transporteuse ayant un axe longitudinal, destinée à soutenir au moins un substrat; au moins deux modules comprenant chacun au moins une torche au plasma destinée à déposer une couche de produit de réaction sur ledit substrat, ladite torche au plasma étant située à une certaine distance du substrat; une chambre destinée à contenir la courroie transporteuse et les deux modules précités; et un système d'échappement. Dans un autre mode de réalisation, l'appareil de dépôt par plasma pour la fabrication de cellules solaires comprend: des moyens de support de substrat; des moyens d'approvisionnement en réactifs; des moyens torche au plasma permettant de déposer un produit sur le substrat, les moyens torche au plasma étant situés à une certaine distance du substrat; et des moyens permettant de faire osciller les moyens torche au plasma par rapport au substrat.

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