Plasma discharge apparatus

Details Plasma discharge apparatus Plasma discharge apparatus

H - Electricity

01

J

H01J 61/16 (2006.01) H01J 17/20 (2006.01) H01J 17/49 (2006.01) G02F 1/133 (2006.01)

Patent

CA 2156812

A plasma discharge apparatus formed with a plasma chamber in which discharge is carried out wherein use is made, as the discharge gas sealed in the plasma chamber, of a mixed gas represented by Ne100-x Ar x A y (wherein, A is Ar, Kr, and/or Xe, x is 10 to 30 percent by volume, and y is 1 to 10 percent by volume). Note that when Kr and Xe are included as A, it is preferable that the Kr be included in an amount of 1 to 5 percent by volume and the Xe in an amount of 1 to 5 percent by volume.

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