Plasma enhanced chemical vapor deposition of metal oxide

Details Plasma enhanced chemical vapor deposition of metal oxide Plasma enhanced chemical vapor deposition of metal oxide

C - Chemistry, Metallurgy

23

C

C23C 16/40 (2006.01) C23C 16/50 (2006.01)

Patent

CA 2562914

A metal oxide coating can be applied to a substrate (60) at a relatively low temperature and at or near atmospheric pressure by carrying a metal oxide precursor (10) and an oxidizing agent through a corona discharge (40) or a dielectric barrier discharge to form the metal oxide and deposit it onto to the substrate.

Il est prévu un revêtement d~oxyde de métal que l~on peut appliquer à un substrat (60) à une température relativement basse et à la pression atmosphérique ou une pression voisine de cette dernière en transportant un précurseur d~oxyde de métal (10) et un agent oxydant par le biais d~une décharge de corona (40) ou une décharge de protection diélectrique pour former l~oxyde de métal, avant dépôt sur le substrat.

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