Plasma generator

Details Plasma generator Plasma generator

H - Electricity

05

H

H05H 1/24 (2006.01)

Patent

CA 2351854

A microfabricated plasma generator and a method of generating a plasma, the plasma generator comprising: a substrate chip; a chamber defined by the substrate chip, the chamber including an inlet port through which analyte is in use delivered, an outlet port and a plasma-generation region in which a plasma is in use generated; and first and second electrodes across which a voltage is in use applied to generate a plasma in the plasma-generation region.

L'invention se rapporte à un générateur de plasma microfabriqué et à un procédé de génération d'un plasma. Ledit générateur de plasma comporte une puce substrat; une chambre possédant un orifice d'admission par lequel l'analyte est introduit; un orifice de sortie et une région pour la génération du plasma, dans laquelle le plasma est généré; et une première et une seconde électrode entre lesquelles une tension est appliquée aux fins de production d'un plasma dans la région prévue à cet effet.

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