H - Electricity – 05 – H
Patent
H - Electricity
05
H
H05H 1/46 (2006.01) H01J 37/32 (2006.01) H01L 21/3065 (2006.01) C23C 16/50 (2006.01) C23F 4/00 (2006.01)
Patent
CA 2432068
The whole antenna conductor is housed in the interior of a vacuum container of a plasma generator thereby to eliminate the need for an insulating partition or a top plate so that the whole induction field radiated from the antenna can be effectively utilized. Furthermore, the occurrence of abnormal discharge is suppressed to stabilize a high-density plasma by reducing the inductance of the antenna and covering the antenna conductor with an insulator.
Selon l'invention, des conducteurs d'antenne sont intégralement logés dans un contenant à vide d'un générateur plasma de manière à s'affranchir de séparations isolantes et d'un couvercle, ainsi le champ électrique produit par l'antenne peut être exploité efficacement. Toute décharge anormale est par ailleurs supprimée de manière à stabiliser le plasma haute densité par réduction de l'inductance de l'antenne et couverture des conducteurs d'antenne avec un isolant.
Miyake Shoji
Setsuhara Yuichi
Shoji Tatsuo
Japan Science And Technology Corporation
Sim & Mcburney
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