Plasma modification of organic films

Details Plasma modification of organic films Plasma modification of organic films

H - Electricity

01

L

H01L 33/00 (2006.01) C23C 14/02 (2006.01) C23C 14/20 (2006.01) H01L 51/00 (2006.01) H01L 51/52 (2006.01) H01L 51/56 (2006.01)

Patent

CA 2384729

Organic thin films are being exploited for a number of applications ranging from solar cells to organic light-emitting diodes (OLEDs). In such devices it is necessary to form a high quality electrical contact with the organic film of interest. The ability of a metal contact to stick to an organic film is often limited. This can be particularly problematic as evidenced by the deleterious formation of dark spots in OLEDs. We have shown that an organic film exposed to a plasma treatment demonstrates improved wettability, an enhanced sticking coefficient and better adhesion to a metal film thereafter deposited. It is further believed that this process leads to an improved electrical contact and suppression of dark spot formation. Thus, an increase in the lifetime of OLEDs and other electrical devices incorporating organic thin films is anticipated.

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