Plasma polymerization and surface modification inside hollow...

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B01D 67/00 (2006.01) B01D 69/12 (2006.01) B01J 19/08 (2006.01) B05D 7/22 (2006.01) B05D 7/24 (2006.01) B29C 59/14 (2006.01) C03C 17/00 (2006.01) C04B 41/45 (2006.01) C23C 16/04 (2006.01) C23C 16/48 (2006.01)

Patent

CA 2120460

PLASMA POLYMERIZATION AND SURFACE MODIFICATION INSIDE HOLLOW MICRO-SUBSTRATES ABSTRACT There is disclosed a process and product of such a process for forming a plasma-induced surface modification or polymerized coating inside very small (?2 mm) diameter hollow substrates.

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