Plasma reactor with voltage transformer

Details Plasma reactor with voltage transformer Plasma reactor with voltage transformer

H - Electricity

05

H

356/177, 358/22,

H05H 1/46 (2006.01) H01J 37/32 (2006.01) H01L 21/308 (2006.01) H05H 1/18 (2006.01)

Patent

CA 1241128

Abstract PLASMA REACTOR WITH VOLTAGE TRANSFORMER A plasma reactor comprises a working chamber, the chamber being adapted to receive at least one article and a volume of plasma which is capable of interacting with a ma- terial of the article. A pair of electrodes are positioned about the chamber. Further, a radio-frequency generator is provided. More particularly, the plasma reactor includes a radio-frequency voltage transformer. The transformer in- cludes a primary winding that is connected to the generator and a secondary winding the center of which is grounded. The secondary winding is adapted to transform the energy received from the primary winding into plasma-exciting energy at the electrodes, whereby the voltage between the plasma and the ground is small such that voltage discharge between the plasma and any grounded parts is minimized.

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