Plasma removal of unwanted material

Details Plasma removal of unwanted material Plasma removal of unwanted material

B - Operations, Transporting

01

J

204/96

B01J 19/08 (2006.01) B05D 3/14 (2006.01) C23F 4/00 (2006.01) C23G 5/00 (2006.01) H05H 1/00 (2006.01)

Patent

CA 2021315

A method for removing coatings from surfaces without damaging the underlying surface includes placing a surface having material to be removed thereon into a plasma reactor and exposing it to a gaseous plasma comprising a reactive halogen species. The reactive halogen species may be derived from one or more of many well known halogen gases. An optional step of cleaning the coating prior to exposure to the halogen plasma is recommended.

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