Plasma synthesis of metal oxide nanoparticles

Details Plasma synthesis of metal oxide nanoparticles Plasma synthesis of metal oxide nanoparticles

C - Chemistry, Metallurgy

01

B

C01B 13/28 (2006.01) B01J 19/00 (2006.01) B22F 1/00 (2006.01) C01B 13/14 (2006.01) C01G 23/00 (2006.01) C01G 23/07 (2006.01) C09D 1/00 (2006.01)

Patent

CA 2481150

A process for minimizing and even eliminating over-sized particles in a vapor phase synthesis of metal oxide-containing particles comprising reacting oxygen with one of more vapor streams comprising a titanium halide, a silicon halide and a compound selected from the group consisting of phosphorous, germanium, boron, tin, niobium, chromium, silver, gold, palladium aluminum, and mixtures thereof in a plug flow, plasma reactor.

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