Plate aligning

Details Plate aligning Plate aligning

G - Physics

01

B

33/48, 88/0.1

G01B 9/02 (2006.01) G03F 9/00 (2006.01)

Patent

CA 1093297

ABSTRACT OF THE DISCLOSURE First and second plates are formed with like periodic patterns. A laser beam illuminates the second plate through the alignment marks of the first plate to provide a pair of diffracted beams that are detected with alignment being indicated when the beams are of the same intensity.

302436

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