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Patent
H - Electricity
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H01L 21/316 (2006.01) C04B 41/50 (2006.01) C04B 41/52 (2006.01) C23C 18/12 (2006.01) H01L 21/312 (2006.01) H01L 21/56 (2006.01) H01L 23/29 (2006.01) H01L 21/314 (2006.01)
Patent
CA 1339852
This invention relates to materials produced by diluting in a solvent a platinum or rhodium catalyzed preceramic mixture of a hydrogen silsesquioxane resin. The preceramic mixture solvent solution is applied to a substrate and ceramified by heating. One or more ceramic coatings containing silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the ceramified SiO2 coating. A CVD or PECVD top coating can be applied for further protection. The invention is particularly useful for coating electronic devices.
549113
Haluska Loren A.
Michael Keith W.
Tarhay Leo
Dow Corning Corporation
Gowling Lafleur Henderson Llp
Haluska Loren A.
Michael Keith W.
Tarhay Leo
LandOfFree
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