Plugged pinhole thin film and method of making same

Details Plugged pinhole thin film and method of making same Plugged pinhole thin film and method of making same

H - Electricity

01

L

356/178

H01L 21/30 (2006.01) H01L 31/04 (2006.01) H01L 31/18 (2006.01)

Patent

CA 1165016

PLUGGED PINHOLE THIN FILM AND METHOD OF MAKING SAME ABSTRACT A thin film and method of making the same involving a film in which pinholes In the film are plugged with insoluble photoresist material. The film is substantially opaque to the light wavelength range causing said photoresist material to become Insoluble. The method for making such thin film in- volves coating said thin film on one side with a layer of In- sulating photoresist material so that a substantial portion of substantially all of the pinholes are filled and then exposing the other side of the film to the light wavelength range caus- ing said photoresist material to become insoluble.

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