Pneumatic control of the motion of objects suspended on an...

Details Pneumatic control of the motion of objects suspended on an... Pneumatic control of the motion of objects suspended on an...

H - Electricity

05

K

356/194

H05K 13/00 (2006.01) B65G 51/02 (2006.01) B65G 51/03 (2006.01) H01L 21/677 (2006.01)

Patent

CA 1089115

PNEUMATIC CONTROL OF THE MOTION OF OBJECTS SUSPENDED ON AN AIR FILM ABSTRACT This specification deals with the stopping, posi- tioning,orienting and redirecting a semiconductor wafer being transported along a track on an air film or bed of air. The stopping mechanism is an air jet located in a groove in the track, wafers passing over this air jet on an air film are sensed by a pneumatic sensor that turns on the air jet to set up an air stream under the transporting surface of the air film. This air stream sucks the fluid in the air film along with it in the groove causing a vacuum in the bed in the area of the noz- zle of the air jet. The wafers are then stopped by the suction of the vacuum. Positioning, orienting and redirecting is done using the air jet and pneumatic sensor in combination with special air jet arrangements and operations.

291046

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