Pnictide trap for vacuum systems

Details Pnictide trap for vacuum systems Pnictide trap for vacuum systems

F - Mech Eng,Light,Heat,Weapons

01

N

23/375

F01N 3/10 (2006.01) B01D 8/00 (2006.01)

Patent

CA 1243472

ABSTRACT A fore line trap is located before the forepump in a vacuum system. The trap utilizes a cracker, which may be a heated filament or a plasma, and cold walls. The cracker cracks pnictide gas species such as P4 into other species such as P2 which have a higher sticking co-efficient. The pnictides are deposited on the cold walls. The cold walls preferably comprise a sleeve which may be removed from the trap and replaced by a clean one.

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