Point scattering detector

Details Point scattering detector Point scattering detector

H - Electricity

01

J

358/10

H01J 37/04 (2006.01) G01T 1/29 (2006.01) H01J 37/244 (2006.01)

Patent

CA 1101129

TITLE: POINT SCATTERING DETECTOR INVENTORS Peter B. Sewell Kovilvila N. Ramachandran ABSTRACT OF DISCLOSURE A beam analyzing system using a point scattering detector in conjunction with the standard secondary electron collector and imaging system of a scanning electron microscope. The detector consists of a sharp metal (preferably tungsten) tip located centrally in a biased aperture assembly mounted in the specimen stage. By scanning the image within the aperture and collecting the secondary electrons scattered from a controlled region of the tip, the electron beam intensity can be obtained and reconstructed on a display screen.

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