Polishing method and polishing film for use in the polishing...

B - Operations – Transporting – 24 – B

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B24B 1/00 (2006.01) B24B 19/00 (2006.01) B24D 3/02 (2006.01) B24D 3/28 (2006.01) B24D 11/00 (2006.01) C09K 3/14 (2006.01)

Patent

CA 2554153

Disclosed is a polishing method which is effective to prevent lowering of the polishing efficiency in the later stage of polishing. The polishing method is characterized in that polishing is performed while so adjusting a polishing liquid as to have a pH of not less than 2 and less than 7.

L'invention concerne un procédé de polissage efficace pour prévenir toute perte d'efficacité de polissage lors d'un polissage ultérieur. Ce procédé de polissage se caractérise en ce que, pendant le polissage, un liquide de polissage est ajusté de façon à présenter un pH compris entre 2 et 7.

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