Polycrystalline silicon interconnect structure for...

Details Polycrystalline silicon interconnect structure for... Polycrystalline silicon interconnect structure for...

H - Electricity

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L

356/126

H01L 29/00 (2006.01) H01J 1/14 (2006.01) H01J 5/02 (2006.01) H01L 21/00 (2006.01) H01L 23/522 (2006.01) H01L 23/532 (2006.01) H01L 27/088 (2006.01)

Patent

CA 951437

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