Polycrystalline silicone capable of yielding long lifetime...

Details Polycrystalline silicone capable of yielding long lifetime... Polycrystalline silicone capable of yielding long lifetime...

C - Chemistry, Metallurgy

30

B

148/3.7

C30B 13/16 (2006.01) C01B 33/035 (2006.01) C30B 13/00 (2006.01) C30B 29/06 (2006.01)

Patent

CA 1321531

- 24 - POLYCRYSTALLINE SILICON CAPABLE OF YIELDING LONG LIFETIME SINGLE CRYSTALLINE SILICON Abstract of the Disclosure Polycrystalline silicon rod capable of providing within no more than two floating zoning passes, unicryfitalline silicon exhibiting a resistivity of at least 10,000 ohm-cm (donor) and a lifetime of at least about 10,000 microseconds, exhibits a copper X-ray diffraction pattern having a peak at 26.85?0.25° (2 theta) and has less than 15 ppta boron and less than 20 ppta phosphorus. D-15,965

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