Polyfunctional vinyl ether compounds and photoresist resin...

Details Polyfunctional vinyl ether compounds and photoresist resin... Polyfunctional vinyl ether compounds and photoresist resin...

C - Chemistry, Metallurgy

07

C

C07C 43/23 (2006.01) C07C 43/295 (2006.01) C08G 8/04 (2006.01) C08G 8/20 (2006.01) C08G 8/22 (2006.01) C08G 8/24 (2006.01) C08G 8/28 (2006.01) G03F 7/027 (2006.01) G03F 7/028 (2006.01) G03F 7/038 (2006.01)

Patent

CA 2115333

ABSTRACT OF THE DISCLOSURE A polyfunctional vinyl ether compound represented by formula (I): Image (I) wherein n, which is an average repeating number, represents a number of from 0 to 20; R1 and R2 each independently represents a hydrogen atom, a halogen atom, an alkyl group, an aryl group, an aralkyl group, an alkoxy group, an aryloxy group, or a cycloalkyl group; Q each independently represents -OH or a group represented by the formula -OROCH=CH2, wherein R represents an alkylene group having from 1 to 12 carbon atoms, the molar ratio of (-OH)/(-OROCH=CH2) being from 10/90 to 90/10; and A each independently represents a divalent hydrocarbon group having from 1 to 30 carbon atoms. - 59 -

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