Polyloaded optical waveguide devices

Details Polyloaded optical waveguide devices Polyloaded optical waveguide devices

G - Physics

02

B

G02B 6/12 (2006.01) G02B 6/13 (2006.01) G02B 6/24 (2006.01) G02B 6/42 (2006.01) H01L 27/02 (2006.01)

Patent

CA 2725883

A device for coupling light into/from an integrated optical/electronic circuit disposed at least in part in a wafer having an insulator layer (152, 104) and an upper semiconductor layer that includes an optical waveguide (160). The integrated optical/electronic circuit includes at least one active optical waveguide device (150), and at least one passive optical waveguide device (800), each of which is associated with, at least in part, in the upper semiconductor layer. In one aspect, the passive optical waveguide device (800) can be created by deposing a polysilicon layer (191) on the upper semiconductor layer. In another aspect, the passive optical waveguide device can be created by etching a Total Internal reflection (TIR) boundary within the upper semiconductor layer.

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