Polysilicon produced by a fluid bed process

Details Polysilicon produced by a fluid bed process Polysilicon produced by a fluid bed process

C - Chemistry, Metallurgy

01

B

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C01B 33/02 (2006.01) B01J 8/26 (2006.01) C01B 33/021 (2006.01) C01B 33/027 (2006.01) C01B 33/029 (2006.01) C30B 29/06 (2006.01)

Patent

CA 1294755

ABSTRACT POLYSILICON PROCESS AND PRODUCT A polysilicon process is disclosed in which the fines which are inherently produced in a fluid bed deposition type operation using silicon seed particles and a silane feed are in effect glued on to the product part- icles so as to reduce the undesirable effect of the silicon fines. The process comprises operating a fluid bed in two modes. In the first mode, high productivity is favored at the expense of producing fines which are produced by homogeneous decomposition of the silane feed. In the second mode, the fines are in effect glued on to the particles to which they are adhered by means of deposition of a thin layer of silicon. In the second mode, the concetration of the silane in the feed gases is reduced thus favoring hetergeneous deposition of the silicon on the silicon particles in the bed. The process can be operated using a single fluid bed reactor by alternating cycles or in a more continuous manner utilizing two fluid bed reactors, the first reactor being operated at the high productivity rate with the second reactor taking the silicon particles from the first reactor and operated at the gluing on conditions.

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