Porous ceramic thin film and process for preparing the same

Details Porous ceramic thin film and process for preparing the same Porous ceramic thin film and process for preparing the same

B - Operations, Transporting

32

B

117/110

B32B 5/18 (2006.01) B32B 18/00 (2006.01) C03C 17/23 (2006.01) C23C 18/12 (2006.01)

Patent

CA 1224985

Abstract of the Disclosure A process for preparing a porous ceramic thin film which comprises applying a solution containing an organometalic compound and a multifunctional organic compound to a substrate, and thermally decomposing the compounds. The porous ceramic thin film prepared by the process has pores of not more than 10 µm in pore size, and is available for materials of various sensors.

453937

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