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Patent
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H01L 21/22 (2006.01) C30B 31/16 (2006.01)
Patent
CA 1245424
81008A/203(B) POROUS SILICON NITRIDE SEMICONDUCTOR DOPANT CARRIERS ABSTRACT New porous semiconductor dopant carriers are disclosed together with a method for the diffusion doping of semiconductors by the vapor phase transport of an n or p type dopants, such as phosphorus, arsenic, antimony, boron, gallium, aluminum, zinc, silicon, tellurium, tin and cadmium to the semiconductor host substrate; wherein the dopant source comprises a dopant containing porous, inert, rigid dimensionally stable and thermal shock resistant reaction sintered Si3N4 carrier material.
456084
Demunda Gabriel P.
Tressler Richard E.
Borden Ladner Gervais Llp
Demunda Gabriel P.
Tressler Richard E.
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