Porous silicon nitride semiconductor dopant carriers

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H01L 21/22 (2006.01) C30B 31/16 (2006.01)

Patent

CA 1245424

81008A/203(B) POROUS SILICON NITRIDE SEMICONDUCTOR DOPANT CARRIERS ABSTRACT New porous semiconductor dopant carriers are disclosed together with a method for the diffusion doping of semiconductors by the vapor phase transport of an n or p type dopants, such as phosphorus, arsenic, antimony, boron, gallium, aluminum, zinc, silicon, tellurium, tin and cadmium to the semiconductor host substrate; wherein the dopant source comprises a dopant containing porous, inert, rigid dimensionally stable and thermal shock resistant reaction sintered Si3N4 carrier material.

456084

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