G - Physics – 03 – F
Patent
G - Physics
03
F
96/161
G03F 7/021 (2006.01) G03F 7/016 (2006.01)
Patent
CA 2007546
Abstract of the Disclosure A positively operating radiation-sensitive mixture comprising a binder which is insoluble in water but soluble or at least swellable in aqueous alkaline solution, and as a photoactive component a polyfunctional .alpha.-diazo-.beta.-keto ester of the general formula I Image (I) in which R1 denotes an aliphatic, cycloaliphatic or araliphatic or aromatic radical having 4 to 20 carbon atoms, in which individual CH2 groups can be replaced by oxygen or sulfur atoms or by ? or NH groups and/or contain keto groups, X denotes an aliphatic, cycloaliphatic, carbocyclic, heterocyclic or aralilphatic radical having 2-to 22 carbon atoms, in which individual CH2 groups can be replaced by oxygen or sulfur atoms or by the groups -NR2-, -C(O)-O-, -C(O)-NR2-, -C(O)- ?, NR2-C(O)-NR3-, -O-C(O)-NR2-, -O-C(O)- ? or -O-C(O)-O-, or CH groups can be replaced by ?, in which R2 and R3 indepen- dently of one another represent hydrogen or an aliphatic, carbocyclic or araliphatic radical, m denotes an integer from 2 to 10 and ? n denotes an integer from 0 to 2, wherein m-n is ? 2, is described. The radiation-sensitive mixture is particularly suitable for exposure using radiation of wavelength 190 to 300 nm. ?
Dammel Ralph
Merrem Hans-Joachim
Pawlowski Georg
Wilharm Peter
Dammel Ralph
Fetherstonhaugh & Co.
Hoechst Aktiengesellschaft
Merrem Hans-Joachim
Pawlowski Georg
LandOfFree
Positively operating radiation-sensitive mixture containing... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Positively operating radiation-sensitive mixture containing..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Positively operating radiation-sensitive mixture containing... will most certainly appreciate the feedback.
Profile ID: LFCA-PAI-O-2070342