Power semiconductor device

H - Electricity – 01 – L

Patent

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Details

H01L 29/06 (2006.01) H01L 29/32 (2006.01) H01L 29/74 (2006.01) H01L 29/861 (2006.01) H01L 29/87 (2006.01)

Patent

CA 2186796

The present invention relates to a power semiconductor device such as a diode and thyristor. In a semiconductor device such as a diode and thyristor having at least one pn junction between a pair of main surfaces, a first main electrode is formed on the surface of one of the main surfaces and a second main electrode is formed on the surface of the other one of the main surfaces. A semiconductor lattice defect is formed such that its lattice defect density increases gradually in the direction from the first main electrode to the second main electrode. Since the distribution of carrier density in the conduction state can be flattened according to the invention, the reverse recovery charge can be reduced substantially without causing the ON-state voltage to increase.

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