H - Electricity – 01 – S
Patent
H - Electricity
01
S
H01S 3/038 (2006.01)
Patent
CA 2146641
An anode (14) and a cathode (16) in a laser (10) are spaced in a first direction. A voltage difference be- tween these members produces an electrical discharge which ionizes gases (18) in the laser (10) to react chemi- cally and produce coherent radiation. First and second tubes (22) made from a dielectric material are spaced in the laser (10) in a second direction transverse (preferably perpendicular) to the first direction. The anode (14), the cathode (16) and the tubes (22) extend through the laser (10) in a direction transverse (preferably perpendicular) to the first and second directions. The tubes (22) are preferably at least a 99.9 % pure polycrystalline alumi- num oxide ceramic with traces of other metallic elements than aluminum. Bushings (24) made from a material homogenous (preferably identical) to the tube material are integral with the tube (22) near the opposite tube ends. First electrical conductors (30) extend through the tubes (22). Second electrical conductors (32) (preferably resilient) contact (preferably line contact) the external tube surfaces to define capacitors with the first conduc- tors (30) and the tube material. Positioning members (36) movably engage the tube external surfaces near the tube ends in co-operation with the resilient members es- tablishing three (3) - line contacts with the tubes (22) for positioning the tubes (22) precisely in the cavity (1). When a voltage pulse is applied between the first conductor (30) inside each tube (22) and the conductors (32) on such tube (22), the resultant cor- ona discharge from the external tube surface produces ultraviolet light which pre-ionizes the gases (18) in the cavity (12). This fa- cilitates the ionization of the gases (18) in the cavity (12) when an anode (14)-cathode (16) electrical discharge is produced.
Cymer Inc.
Cymer Laser Technologies
Fetherstonhaugh & Co.
LandOfFree
Pre-ionizer for a laser does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Pre-ionizer for a laser, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Pre-ionizer for a laser will most certainly appreciate the feedback.
Profile ID: LFCA-PAI-O-1456307