Precursors and processes for making metal oxides

Details Precursors and processes for making metal oxides Precursors and processes for making metal oxides

C - Chemistry, Metallurgy

07

F

C07F 9/00 (2006.01) C01B 13/32 (2006.01) C01G 1/02 (2006.01) C07F 7/28 (2006.01) C23C 18/12 (2006.01) C23C 18/14 (2006.01) C30B 7/00 (2006.01) H01L 21/02 (2006.01) H01L 21/316 (2006.01) H01L 27/108 (2006.01) H01L 27/115 (2006.01) C23C 16/44 (2006.01) H01L 21/314 (2006.01)

Patent

CA 2145878

A first metal, an alcohol, and a carboxylic acid are reacted to form a metal alkoxycarboxylate which is then reacted with an alkoxide and/or a carboxylate of a second metal to form a precursor. Alternatively, a metal carboxylate and a metal alkoxide are combined and heated to form a precursor. In either alternative, the precursor includes all or most of the metal-oxygen-metal bonds of a desired metal oxide and a carboxylate ligand. The precursor is applied to a substrate (18, 38, 47, 75), dried and an- nealed to form the metal oxide (12, 30, 48, 60), such as BST. The metal-oxygen-metal bonds in the precursor permit the desired metal oxide (12, 30, 48, 60) to be formed from the precursor in one step, providing excellent thin films suitable for integrated cir- cuits. The carboxylate ligand provides stability to the precursor allowing it to be stored for periods common in large scale manu- facturing.

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