Preparation method of amorphous superlattice alloys

Details Preparation method of amorphous superlattice alloys Preparation method of amorphous superlattice alloys

C - Chemistry, Metallurgy

22

C

204/96.09

C22C 1/00 (2006.01) C22C 45/00 (2006.01) C23C 14/14 (2006.01) C23C 14/34 (2006.01) C23C 14/50 (2006.01)

Patent

CA 2000171

Preparation method of amorphous superlattice alloys consisting of lamellae based on periodic change in the composition by continuous conventional sputtering during periodic change in the positions of substrates relative to a target or targets.

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