Preparation of aluminum oxynitride from...

Details Preparation of aluminum oxynitride from... Preparation of aluminum oxynitride from...

C - Chemistry, Metallurgy

01

F

C01F 7/00 (2006.01) C01B 21/082 (2006.01) C04B 35/581 (2006.01) C23C 16/30 (2006.01)

Patent

CA 2052889

-14- ABSTRACT Aluminum oxynitride is prepared by the pyrolysis of an organosiloxydihaloalane such as trimethylsiloxydi- chloroalane in the presence of a nitrogen-containing atmosphere. The organosiloxydihaloalane may conveniently be prepared by reacting together an aluminum halide and at least one disiloxane. 5538I

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