Preparation of cadmium stannate films

Details Preparation of cadmium stannate films Preparation of cadmium stannate films

C - Chemistry, Metallurgy

23

C

204/96.1

C23C 14/08 (2006.01) C03C 17/245 (2006.01)

Patent

CA 1111373

ABSTRACT OF THE DISCLOSURE Transparent, electrically conductive Cd2Sn04 films are prepared by RF (radio-frequency) or DC (direct current) sputtering techniques utilizing a Cd/Sn alloy metal target having mol ratio of Cd to Sn of from about 1.7:1 to 2.5:1, in an oxygen plasma.

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