Preparation of dielectric coatings of variable dielectric...

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204/96.17

B05D 3/14 (2006.01) B05D 7/24 (2006.01) C08F 2/52 (2006.01) H01B 19/04 (2006.01)

Patent

CA 1070263

TITLE OF OF THE INVENTION: PREPARATION OF DIELECTRIC COATINGS OF VARIABLE DIELECTRIC CONSTANT BY PLASMA POLYMERIZATION ABSTRACT OF THE DISCLOSURE: A plasma polymerization process for the deposition of a dielectric polymer coating on a substrate comprising disposing the substrate in a closed reactor between two temperature-controlled electrodes connected to a power supply, maintaining a vacuum within the closed reactor, causing a monomer gas or a gas mixture of a monomer and diluent to flow into the reactor, generating a plasma between the electrodes, and varying and con- trolling the dielectric constant of the polymer coating being deposited by regulating the gas total and partial pressures, the electric field strength and frequency, and the current density. A monomer, such as a polar saturated or unsaturated nitrogen-containing compound, or a monomer and diluent, such as a saturated or unsaturated aliphatic hydrocarbon and nitrogen, can be polymerized to form a dielectric coating having a varying dielectric constant in accordance with this plasma polymerization process.

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