Preparation of photodiodes

Details Preparation of photodiodes Preparation of photodiodes

H - Electricity

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H01L 31/18 (2006.01) H01L 21/318 (2006.01) H01L 31/0216 (2006.01)

Patent

CA 1199097

- 9 - PREPARATION OF PHOTODIODES Abstract A process is described for fabricating various optical devices including photodiodes in which a protective dielectric layer is put down on the surface of the device prior to heating to temperatures over about 250-300 degrees C. Such devices have excellent performance characteristics including low dark current and low noise figures.

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