Preparation of thin film ceramics by sol gel processing

Details Preparation of thin film ceramics by sol gel processing Preparation of thin film ceramics by sol gel processing

C - Chemistry, Metallurgy

04

B

C04B 35/49 (2006.01) C01G 23/00 (2006.01) C01G 25/00 (2006.01) C04B 35/491 (2006.01) H01L 41/24 (2006.01)

Patent

CA 2065381

2065381 9012755 PCTABS00002 A method of making a mixed sol to produce a titanate-based or zirconate-based ceramic. A metal salt such as lead acetate is dissolved in a stabilising agent such as glacial acetic acid, used in a concentration such that subsequent addition of titanium and zirconium alkoxide sols is effected without precipitation. PZT ceramic films made from the mixed sols have: dielectric constant 150-4000; dielectric loss factor 0.001-0.08; saturation polarisation 0.8 µC/cm2.

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