Preparation of uniform thin films

Details Preparation of uniform thin films Preparation of uniform thin films

B - Operations, Transporting

05

D

117/121, 117/184

B05D 1/18 (2006.01) B05D 1/20 (2006.01) C08J 7/04 (2006.01) G03F 7/075 (2006.01)

Patent

CA 2012086

- 13 - O.Z. 0050/40740 Abstract of the Disclosure: Uniform thin films from 40 .ANG./ to 1 µm in thickness which are etch stable to oxygen plasma are prepared and are transferable to the substrate by the Langmuir-Blodgett technique or by the self-assem- bly technique.

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