Preservation of surface features on semiconductor surfaces

Details Preservation of surface features on semiconductor surfaces Preservation of surface features on semiconductor surfaces

H - Electricity

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H01L 21/324 (2006.01) H01L 21/20 (2006.01) H01L 21/208 (2006.01) H01L 21/311 (2006.01) H01L 21/32 (2006.01) H01S 5/028 (2006.01) H01S 5/12 (2006.01) H01S 5/227 (2006.01) H01S 5/323 (2006.01) H01L 33/00 (2006.01)

Patent

CA 1292548

PRESERVATION OF SURFACE FEATURES ON SEMICONDUCTOR SURFACES Abstract The integrity of surface structural features (e,g., distributed feedback gratings) in Group III-V compound semiconductors is preserved during heating (e.g., subsequent LPE regrowth) by a thin coating containing a transition metal (e.g., Os, Ru or Rh). DFB-DCPBH InP/InGaAsP single frequency lasers made in this way are also described.

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