Pressure measurement using a mems device

Details Pressure measurement using a mems device Pressure measurement using a mems device

G - Physics

01

L

G01L 9/00 (2006.01) B81B 7/02 (2006.01)

Patent

CA 2728433

A device to measure pressure is disclosed. In one embodiment, the device comprises at least one element comprising two layers (24, 26) separated by a space, wherein a dimension of the space changes over a variable time period in response to a voltage applied across the two layers and a measuring module configured to measure the time period, wherein the time period is indicative of the ambient pressure about the device.

L'invention porte sur un dispositif pour mesurer une pression. Dans un mode de réalisation, le dispositif comprend au moins un élément comprenant deux couches séparées par un espace, une dimension de l'espace changeant en fonction d'une période de temps variable en réponse à une tension appliquée entre les deux couches, et un module de mesure configuré pour mesurer la période de temps, la période de temps étant indicative de la pression ambiante autour du dispositif.

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