Pressure-measuring arrangement with high linearity

Details Pressure-measuring arrangement with high linearity Pressure-measuring arrangement with high linearity

G - Physics

01

L

G01L 9/12 (2006.01) G01L 9/00 (2006.01)

Patent

CA 2101068

- 26 - Pressure-Measuring Arrangement with High Linearity Abstract A pressure-measuring arrangement has a pressure sensor structure with a pressure-dependent measuring capaci- tance, a pressure-independent reference capacitance, and an evaluating circuit which derives the pressure from a capacitance measurement. To reduce the linearity error, according to the inventive pressure-measuring arrangement, a further capacitance is implemented as a pressure-dependent capacitance with a further electrode formed on the diaphragm of the pressure sensor struc- ture, with the measuring electrode and the further elec- trode having angular extensions changing oppositely to each other as a function of the radius, and the transfer function of the evaluating circuit being proportional to the difference between the measuring capacitance and the constant reference capacitance and inversely propor- tional to the pressure-dependent further capacitance.

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