Pressure sensitive transducer

Details Pressure sensitive transducer Pressure sensitive transducer

G - Physics

01

L

26/201, 73/3

G01L 9/12 (2006.01) G01L 9/00 (2006.01)

Patent

CA 1065642

ABSTRACT OF THE DISCLOSURE This invention relates to pressure responsive transducers. The prior art transducer is an unusually compact and effective arrangement for detecting pressure variations and the two diaphragms forming the variable chambers are each soldered or otherwise hermetically secured to a respective electrode on a nonconductive sub- strate. In the described arrangement, at least one of the diaphragms is pierced, usually along its central axis for formng a vacuum between the diaphragms. The hole in the pierced diaphragm was then required to be soldered or sealed in a vacuum chamber. A problem is created not only by the economics and reliability of the process, but also by the response of the diaphragm due to the distortions introduced by the opening and the seal in the diaphragm and by the differences in the reaction of one diaphragm from the other. The present invention is directed to a pressure responsive transducer utilizing dual diaphragms on opposite sides of a sandwich of substrates formed of ceramic and having an intermediate substrate in which a slot is formed to communicate with the diaphragm chamber and eliminate the need for puncturing and/or sealing of one of the diaphragms. External electrical connections to fixed capacitor plates deposited on the outer substrates of the sandwich are extended by forming a lead on the inter- mediate substrate which connects to the fixed plates through aligned openings in the substrates, that also communicate the chambers formed by the diaphragms.

255174

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