Pressure sensor

Details Pressure sensor Pressure sensor

G - Physics

01

L

73/3

G01L 9/12 (2006.01) G01L 9/00 (2006.01)

Patent

CA 1137781

530-78-0987 IMPROVED PRESSURE SENSOR ABSTRACT A pressure sensor including a pressure capsule such as a dual diaphragm quartz capacitance pressure capsule and structure for supporting and sealing same within the pressure environment to be measured. The pressure capsule having two parallel quartz plates spaced by a dielectric ring forming a vacuum chamber therein. The structure providing a force balanced support for compressively loading the pressure capsule through the dielectric ring. The structure further having transfer port therein to communicate the pressure environment to both plates.

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