Pressure sensor

Details Pressure sensor Pressure sensor

G - Physics

01

L

73/8

G01L 7/08 (2006.01) G01L 19/06 (2006.01)

Patent

CA 2028836

The pressure sensor consists of a substrate and a diaphragm joined together around the periphery so as to form a chamber. The surface of the diaphragm facing away from the substrate is exposed to a medium whose pressure is to be measured. To protect the diaphragm against corrosion or abrasion, the diaphragm surface exposed to the medium is covered with a layer of silicon carbide, preferably by chemical vapor deposition.

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