Pressure sensor and a method of manufacturing the same

Details Pressure sensor and a method of manufacturing the same Pressure sensor and a method of manufacturing the same

G - Physics

01

L

G01L 11/02 (2006.01) G01L 9/00 (2006.01)

Patent

CA 2296090

A reflective type movable diaphragm unit 2 is formed on a groove 26-carrying silicon substrate 3, and a bonding agent layer serving also as a spacer 24 is provided around the diaphragm unit, this spacer 24 being bonded to a half mirror layer 11 of an optical fiber 1 with a cross-sectionally semicircular diaphragm portion 25 further provided on the diaphragm unit 2, whereby a pressure sensor is formed.

Pour fabriquer un capteur de pression on forme une unité (2) de diaphragme mobile réfléchissant sur un substrat (3) au silicium comportant une rainure (26), on forme autour de l'unité une couche d'adhésif qui sert également d'élément d'espacement (24), on colle l'élément d'espacement (24) sur la couche (11) de demi-miroir d'une fibre optique et on place sur l'unité (2) de diaphragme une partie (25) de diaphragme à section semi-circulaire.

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