G - Physics – 01 – L
Patent
G - Physics
01
L
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G01L 9/12 (2006.01) G01L 7/08 (2006.01) G01L 9/00 (2006.01)
Patent
CA 1327895
ABSTRACT The pressure sensor comprises a base body and a diaphragm which are assembled at a defined distance apart parallel to each other to form a chamber, at least one of the two assembled parts consisting of ceramic, glass, metal or a monocrystalline material. In dependence upon the external pressure acting on the pressure sensor the distance between said parts and thus the capacitance between two electrodes carried by said parts changes. The base body and the dia- phragm are firmly connected together by a shaped part of metal serving at the same time as spacer. If at least one of the two parts consists of ceramic, glass, metal or a monocrystalline material, the two joined parts can be sold- ered together by a shaped part of active solder. If the two assembled parts consist of oxide ceramic or sapphire they can be connected together by the direct copper bonding method. In this case the shaped part consists of copper which is connected to the two parts by a eutectic melt forming at the surface.
604678
Dittrich Gerhard
Hegner Frank
Klahn Thomas
Endress U. Hauser Gmbh U. Co.
Fetherstonhaugh & Co.
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