G - Physics – 01 – L
Patent
G - Physics
01
L
73/3
G01L 9/12 (2006.01) G01L 9/00 (2006.01)
Patent
CA 2031427
The substrate (12) and/or the diaphragm (11) of the pros- sure sensor (10) are made of ceramic, glass, or a single- crystal material. The side of the diaphragm (11) facing the substrate (12) is covered with a layer of silicon carbide, niobium, or tantalum which, in turn, is covered with a protective layer (21) and serves as one capacitor electrode (14). The side of the substrate (12) facing the diaphragm (11) is covered with at least one addi- tional layer of any one of said materials which, in turn, is covered with an additional protective layer (22) and serves as the second etc. capacitor electrode (15). Sub- strate (12) and diaphragm (11) are soldered together by a formed part of active solder (20) which also serves as a spacer. This pressure sensor can be manufactured in a single soldering step. The maximum load capacity of the dia- phragm is determined not by the strength of the joint, but only by the strength of the diaphragm material. The pressure sensor can be used at higher temperatures than pressure sensors with glass-frit joints.
Frank Manfred
Hegner Frank
Klahn Thomas
Endress U. Hauser Gmbh U. Co.
Fetherstonhaugh & Co.
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