Pressure sensor with a radially tensioned metal diaphragm

Details Pressure sensor with a radially tensioned metal diaphragm Pressure sensor with a radially tensioned metal diaphragm

G - Physics

01

L

G01L 7/08 (2006.01) G01L 9/00 (2006.01) G01L 9/04 (2006.01)

Patent

CA 2412268

A pressure sensor having a radially tensioned diaphragm for measuring fluid pressure. The pressure sensor includes a first generally concave metal body member and a second generally concave metal body member, and a radially tensioned flexible metal diaphragm disposed therebetween that is tensioned by heating the sensor. The first and second body members are formed from a material having a coefficient of thermal expansion in the range of approximately 0.0000056 inch/inch/°F to 0.0000064 inch/inch/°F. The diaphragm is formed from a precipitation hardening metal material having a coefficient of thermal expansion of approximately 0.0000060 inch/inch/°F. The first body member and the second body member are formed from a ferromagnetic metal material such that the first and second body members shield the diaphragm from magnetic fields which may otherwise cause movement of the diaphragm.

Capteur de pression ayant une membrane tendue radialement pour mesurer la pression des fluides. Le capteur de pression inclut un premier élément de corps métallique généralement concave et un deuxième élément de corps métallique généralement concave, ainsi qu'une membrane flexible tendue radialement placée entre les deux éléments, qui est tendue en chauffant le capteur. Le premier et le deuxième éléments de corps sont formés avec un coefficient d'expansion thermique de l'ordre d'environ 0.0000056 pouce /pouce /degré F à 0.0000064 pouce/pouce/degré F. La membrane est formée d'un matériau métallique à durcissement par précipitation ayant un coefficient d'expansion thermique d'environ 0.0000060 pouce/pouce degré F. Le premier élément du corps et le deuxième élément du corps sont formés d'un matériau ferromagnétique de sorte que le premier et le deuxième éléments du corps protègent la membrane contre les champs magnétiques qui peuvent autrement entraîner le mouvement de la membrane.

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