Pressure transducer

Details Pressure transducer Pressure transducer

G - Physics

01

L

73/10, 73/3

G01L 7/08 (2006.01) G01L 9/00 (2006.01) G01L 13/02 (2006.01)

Patent

CA 1225255

PRESSURE TRANSDUCER ABSTRACT OF THE DISCLOSURE A transducer has a first and second sensing diaphragm configured such that a first pressure P1 is applied to the first diaphragm and a second pressure P2 is applied to the second diaphragm and wherein both diaphragms are formed on the same substantially flat face of a diaphragm wafer. The transducer is configured such that each diaphragm responsive to P1 or P2 respectively also affects a fluid in a closed common fluid cavity such that the deflection of the diaphragm is representative of the pressure differential (P1 - P2).

469627

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